JPH01179182U - - Google Patents
Info
- Publication number
- JPH01179182U JPH01179182U JP1819088U JP1819088U JPH01179182U JP H01179182 U JPH01179182 U JP H01179182U JP 1819088 U JP1819088 U JP 1819088U JP 1819088 U JP1819088 U JP 1819088U JP H01179182 U JPH01179182 U JP H01179182U
- Authority
- JP
- Japan
- Prior art keywords
- adsorbent
- cryopumps
- compressors
- outlet
- replacing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003463 adsorbent Substances 0.000 claims description 3
Landscapes
- Compressor (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1819088U JPH01179182U (en]) | 1988-02-16 | 1988-02-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1819088U JPH01179182U (en]) | 1988-02-16 | 1988-02-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01179182U true JPH01179182U (en]) | 1989-12-22 |
Family
ID=31232610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1819088U Pending JPH01179182U (en]) | 1988-02-16 | 1988-02-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01179182U (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4924487A (en]) * | 1972-06-30 | 1974-03-04 | ||
| JPS54153314A (en) * | 1978-05-24 | 1979-12-03 | Ulvac Corp | Regenerative apparatus for cryopump |
| JPS6240143U (en]) * | 1985-08-29 | 1987-03-10 |
-
1988
- 1988-02-16 JP JP1819088U patent/JPH01179182U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4924487A (en]) * | 1972-06-30 | 1974-03-04 | ||
| JPS54153314A (en) * | 1978-05-24 | 1979-12-03 | Ulvac Corp | Regenerative apparatus for cryopump |
| JPS6240143U (en]) * | 1985-08-29 | 1987-03-10 |